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FD-SOI: a Gentle IntroductionSemiWiki - Paul McLellanJul. 27, 2015 |
Over the last couple of weeks, FD-SOI has been in the news with GlobalFoundries announcement of a 22nm FD-SOI process that will run in the Dresden Fab. Also, earlier in the week I talked to Thomas Skotnicki about the saga (and it is a saga) of how FD-SOI got from his PhD thesis to volume manufacturing and global deployment. But there is a lot less knowledge around about FD-SOI than there is about FinFET so I thought it would be good to go back and see where the motivation for a process like that came from.
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