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Motorola licenses numerical technologies'patented phase-shifting technology for semiconductor production
MOTOROLA LICENSES NUMERICAL TECHNOLOGIES' PATENTED PHASE-SHIFTING TECHNOLOGY FOR SEMICONDUCTOR PRODUCTIONCompanies sign multi-year, multi-million dollar agreement
This agreement is an extension of ongoing work between Motorola and Numerical. In February 1999, Motorola announced that it had used Numerical's patented phase-shifting technology to produce 0.1-micron feature sizes, achieving a significant performance increase. "Numerical's phase-shifting technology is now a key component in our high-performance process roadmap," said James Vasek, photolithography technology manager, MOS-13 Die Production division. Y.C. (Buno) Pati, president and CEO of Numerical, said, "Working together, Motorola and Numerical have proven the value of the technology covered under our patent. We're pleased that our approach to phase-shifting has had a positive effect on Motorola's ability to accelerate their roadmap." In March 1999, Numerical received US Patent #5,858,580 for its approach to phase shifting. The Company's iN-Phase software product is a comprehensive package that combines phase shifting with optical proximity correction (OPC) and silicon verification technologies. About Numerical Contacts: Numerical Technologies Cayenne Communication |
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